Title:
プラズマ処理方法およびプラズマ処理装置
Document Type and Number:
Japanese Patent JP4908045
Kind Code:
B2
Inventors:
Hiroshi Akiyama
Naoyuki Koto
Naoyuki Koto
Application Number:
JP2006113562A
Publication Date:
April 04, 2012
Filing Date:
April 17, 2006
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01L21/3065
Domestic Patent References:
| JP2004288863A | ||||
| JP2003257936A | ||||
| JP2002367977A | ||||
| JP10261618A | ||||
| JP5291188A | ||||
| JP2202021A | ||||
| JP2002270582A | ||||
| JP2216823A | ||||
| JP2001168089A |
Attorney, Agent or Firm:
Patent Business Corporation Daiichi International Patent Office