Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
半導体装置の製造方法
Document Type and Number:
Japanese Patent JP4929538
Kind Code:
B2
Inventors:
Hitoshi Yamaguchi
Jun Sakakibara
Noda Ritaka
Application Number:
JP2001199919A
Publication Date:
May 09, 2012
Filing Date:
June 29, 2001
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
株式会社デンソー
International Classes:
H01L21/331; H01L21/336; H01L21/76; H01L21/762; H01L21/8222; H01L21/8248; H01L21/8249; H01L27/06; H01L27/08; H01L29/732; H01L29/786
Domestic Patent References:
JP2000022140A
JP10190002A
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda