ガスクラスターイオンビームによる超精密研磨方法

Title:

ガスクラスターイオンビームによる超精密研磨方法

Document Type and Number:

Japanese Patent JP4939840

Kind Code:

B2

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Inventors:

Tomoki Imamura
Takahiro Morii
Ko Yamada
Kisho Toyoda

Application Number:

JP2006151261A

Publication Date:

May 30, 2012

Filing Date:

May 31, 2006

Export Citation:

Assignee:

Olympus Endo Technology America Inc.
Ko Yamada
Kisho Toyoda

International Classes:

C23F4/00; B23K15/00

Domestic Patent References:

Attorney, Agent or Firm:

Yoshiyuki Osuga

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