Title:
防着板装置
Document Type and Number:
Japanese Patent JP4982004
Kind Code:
B2
More Like This:
| WO/2017/012330 | CRUCIBLE DEVICE |
| JP2738433 | [Title of Invention] Reactive Plasma Beam Film Forming Device |
| JPS57131362 | VACUUM PLATING METHOD AND METAL EVAPORATING DEVICE |
Inventors:
Muneto Hakomori
Kazuya Uchida
Toshiharu Kurauchi
Kazuya Uchida
Toshiharu Kurauchi
Application Number:
JP2000007881A
Publication Date:
July 25, 2012
Filing Date:
January 17, 2000
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C14/24; C23C14/32
Domestic Patent References:
| JP10168561A | ||||
| JP11315370A | ||||
| JP313564A |
Attorney, Agent or Firm:
Yoshihiro Shimizu
Shinichi Abe
Yuji Tsujida
Shinichi Abe
Yuji Tsujida