To provide an apparatus for recycling waste water, which has the stability higher than that of the conventional apparatus when a peroxide is decomposed and the operation of which is managed easily.
An apparatus 20 for recovering peroxide-containing waste water from a rinser is provided with: a pH adjustment unit 21 for adjusting the pH of the peroxide-containing waste water from the rinser; a photocatalyst tank 22 having a photocatalyst and an ultraviolet light source for decomposing the peroxide contained in the waste water from the rinser; a downflow type activated carbon column 24 for decomposing the peroxide remaining in the treated water from the photocatalyst tank 22; and an ion exchange unit 25 for removing an ionic substance contained in the treated water from the activated carbon column 24.
COPYRIGHT: (C)2007,JPO&INPIT
Yasuaki Hashimoto
Tetsuji Fujino
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Takeshi Senda