Title:
表面検査装置および方法
Document Type and Number:
Japanese Patent JP5104443
Kind Code:
B2
Inventors:
Takahiko Oshige
Akira Kazama
Makoto Okuno
Akira Kazama
Makoto Okuno
Application Number:
JP2008073223A
Publication Date:
December 19, 2012
Filing Date:
March 21, 2008
Export Citation:
Assignee:
jfe Steel Corporation
International Classes:
G01N21/892
Domestic Patent References:
| JP11183397A | ||||
| JP9166552A | ||||
| JP58204353A | ||||
| JP2000065755A |
Attorney, Agent or Firm:
Shigeru Inoue
Kazuhiro Mori
Kazuhiro Mori
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