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Title:
保護素子及びその製造方法、並びに化合物半導体装置
Document Type and Number:
Japanese Patent JP5194399
Kind Code:
B2
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Inventors:
Shinichi Tamari
Mitsuhiro Nakamura
Application Number:
JP2006195102A
Publication Date:
May 08, 2013
Filing Date:
July 18, 2006
Export Citation:
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Assignee:
ソニー株式会社
International Classes:
H01L21/329; H01L21/337; H01L21/338; H01L29/808; H01L29/812; H01L29/866
Domestic Patent References:
JP2005277033A
JP2006032582A
Attorney, Agent or Firm:
Kenichiro Matsuo



 
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