めっき装置 - Ebara Corporation

Title:

めっき装置

Document Type and Number:

Japanese Patent JP5232844

Kind Code:

B2

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Inventors:

Nobutoshi Saito
Fumio Kuriyama
Takashi Takemura
Makoto Kimura
Yellow sea cold
Onozawa Masunobu
Kuniaki Horie
Yoshio Minami

Application Number:

JP2010209535A

Publication Date:

July 10, 2013

Filing Date:

September 17, 2010

Export Citation:

Assignee:

Ebara Corporation

International Classes:

C25D5/08; C25D5/18; C25D7/12; C25D21/10; H01L21/288

Domestic Patent References:

Attorney, Agent or Firm:

Isamu Watanabe
Ryoji Kosugi
Tetsuya Hirosawa

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