フォトレジスト用重合体の製造方法

Title:

フォトレジスト用重合体の製造方法

Document Type and Number:

Japanese Patent JP5309660

Kind Code:

B2

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Inventors:

Maeda Yoshio
Sugawara Tetsunori

Application Number:

JP2008096161A

Publication Date:

October 09, 2013

Filing Date:

April 02, 2008

Export Citation:

Assignee:

JSR CORPORATION

International Classes:

C08F2/06

Domestic Patent References:

Attorney, Agent or Firm:

Ippei Watanabe
Koji Kikawa
Chongqing Sugano

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