Title:
薄膜サーミスタセンサ
Document Type and Number:
Japanese Patent JP5316959
Kind Code:
B2
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Inventors:
Hitoshi Inaba
Noriaki Nagatomo
Noriaki Nagatomo
Application Number:
JP2010061053A
Publication Date:
October 16, 2013
Filing Date:
March 17, 2010
Export Citation:
Assignee:
Mitsubishi Materials Corporation
International Classes:
G01K7/22; G01F1/684
Domestic Patent References:
| JP5019929U | ||||
| JP2006308505A | ||||
| JP2002156290A |
Attorney, Agent or Firm:
Hideyuki Sugiura