Title:
ネガ型レジスト組成物およびレジストパターン形成方法
Document Type and Number:
Japanese Patent JP5325424
Kind Code:
B2
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Inventors:
Wataru Hoshino
Masahiro Yoshidome
Masahiro Yoshidome
Application Number:
JP2008010420A
Publication Date:
October 23, 2013
Filing Date:
January 21, 2008
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/004; H01L21/027
Domestic Patent References:
| JP2007246586A | ||||
| JP2005119129A | ||||
| JP4330445A | ||||
| JP2000122284A | ||||
| JP11133608A | ||||
| JP7005684A |
Attorney, Agent or Firm:
Takeshi Takamatsu
Toshiyuki Ozawa
Hasegawa Hiromichi
Toshiyuki Ozawa
Hasegawa Hiromichi