Title:
基板乾燥装置および基板乾燥方法
Document Type and Number:
Japanese Patent JP5373429
Kind Code:
B2
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Inventors:
Katsuhiko Miya
Application Number:
JP2009041797A
Publication Date:
December 18, 2013
Filing Date:
February 25, 2009
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/304; F26B5/04
Domestic Patent References:
| JP4242930A | ||||
| JP2003161575A | ||||
| JP11354486A | ||||
| JP2007027195A | ||||
| JP9260337A | ||||
| JP11294948A |
Attorney, Agent or Firm:
Kakusho Shoichi
Ryose Uji
Ryose Uji