Title:
位置およびオフセットを決定するためのシステムおよび方法
Document Type and Number:
Japanese Patent JP5409649
Kind Code:
B2
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Inventors:
Allen Blanchette Christine
Rodonic Matt
Rodonic Matt
Application Number:
JP2010540810A
Publication Date:
February 05, 2014
Filing Date:
December 19, 2008
Export Citation:
Assignee:
LAM RESEARCH CORPORATION
International Classes:
H01L21/68; G01B11/00; H01L21/3065
Domestic Patent References:
| JP2007324486A | ||||
| JP7037967A | ||||
| JP2002540388A | ||||
| JP11214899A | ||||
| JP2001264015A | ||||
| JP2002151555A | ||||
| JP2006120876A |
Attorney, Agent or Firm:
Meisei International Patent Office