Title:
被検体の欠陥検査方法
Document Type and Number:
Japanese Patent JP5508852
Kind Code:
B2
Abstract:
A method of inspecting defects in an inspection target includes (1) a step of supplying a particle-containing gas to one end face of the inspection target under pressure, applying in parallel a first laser beam to the vicinity of the other end face of the inspection target, and photographing such end face from a position vertical to such end face, (2) a step of supplying a particle-containing gas to the one end face of the inspection target under pressure, applying in parallel a second laser beam to the vicinity of the other end face of the inspection target, and photographing such end face from a position vertical to such end face, and (3) a step of specifying defects in the inspection target from photographic results obtained by the steps (1) and (2).
Inventors:
Tatsuhiko Hatano
Koichi Miyashita
Isao Shikata
Koichi Miyashita
Isao Shikata
Application Number:
JP2009530230A
Publication Date:
June 04, 2014
Filing Date:
September 01, 2008
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
G01M3/20; G01N21/95
Domestic Patent References:
| JPH11326223A | 1999-11-26 | |||
| JPH01320445A | 1989-12-26 | |||
| JPS643545A | 1989-01-09 | |||
| JP2002357562A | 2002-12-13 | |||
| JP2000216208A | 2000-08-04 | |||
| JP2000162141A | 2000-06-16 |
Attorney, Agent or Firm:
Ippei Watanabe
Koji Kikawa
Hiroyuki Sato
Shigeru Koike
Koji Kikawa
Hiroyuki Sato
Shigeru Koike
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