Title:
窒化アルミニウム材料の製造方法及び窒化アルミニウム材料の製造装置
Document Type and Number:
Japanese Patent JP5561212
Kind Code:
B2
Inventors:
Yuichi Aoki
Yukihisa Takeuchi
Toru Ujihara
Mizuno Kohei
Yukihisa Takeuchi
Toru Ujihara
Mizuno Kohei
Application Number:
JP2011055418A
Publication Date:
July 30, 2014
Filing Date:
March 14, 2011
Export Citation:
Assignee:
株式会社デンソー
International Classes:
C01B21/072; H01L23/36; H01L23/473
Domestic Patent References:
| JP2010251648A | ||||
| JP2001321916A | ||||
| JP2008283067A | ||||
| JP2002053944A |
Attorney, Agent or Firm:
Patent Business Corporation Sato International Patent Office