Title:
テストヘッド位置決めシステムと方法
Document Type and Number:
Japanese Patent JP5564004
Kind Code:
B2
Abstract:
An apparatus for supporting a load includes pneumatic units and couplers coupled to opposite sides of the load. The couplers move the load parallel to a first axis responsive to actuation of the pneumatic units. At least one of the couplers rotate the load about a second axis orthogonal to the first axis. The load is compliant along the first axis and about the second axis At least one of the pneumatic units provides compliance along the first axis and about the second axis.
More Like This:
| JP2008002804 | PROBE CARD AND MANUFACTURING METHOD THEREFOR |
| JP2001284421 | CONTACT STRUCTURE |
Inventors:
Christian muller
Application Number:
JP2011049456A
Publication Date:
July 30, 2014
Filing Date:
March 07, 2011
Export Citation:
Assignee:
INTEST CORPORATION
International Classes:
G01R31/26; G01R31/28; H01L21/66
Domestic Patent References:
| JP4282472A | ||||
| JP11118879A | ||||
| JP10221404A | ||||
| JP1295183A | ||||
| JP633090U | ||||
| JP9159729A | ||||
| JP2002277507A | ||||
| JP5595285U | ||||
| JP926458A |
Attorney, Agent or Firm:
Takuji Yamada
Mitsuo Tanaka
Hiroshi Okabe
Mitsuo Tanaka
Hiroshi Okabe