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Title:
感放射線性樹脂組成物、重合体及び化合物
Document Type and Number:
Japanese Patent JP5609980
Kind Code:
B2
Abstract:
A radiation-sensitive resin composition includes a polymer having a structural unit represented by a formula (I). In the formula (I), R1 represents a hydrogen atom or a methyl group. X represents a bivalent alicyclic hydrocarbon group not having or having a substituent. Y represents a bivalent hydrocarbon group having 1 to 20 carbon atoms. R2 represents a methyl group or a trifluoromethyl group.

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Inventors:
中島 浩光
木村 礼子
中原 一雄
佐藤 光央
Application Number:
JP2012533010A
Publication Date:
October 22, 2014
Filing Date:
September 07, 2011
Export Citation:
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Assignee:
ＪＳＲ株式会社
International Classes:
G03F7/039; C08F20/28
Domestic Patent References:
JP2007284381A2007-11-01
JPH1112325A1999-01-19
JPH1115164A1999-01-22
JPH1135848A1999-02-09
JP2005238816A2005-09-08
Attorney, Agent or Firm:
Kazuki Amano



 
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