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Title:
マスクブランク用基板の製造方法及びマスクブランクの製造方法
Document Type and Number:
Japanese Patent JP5635839
Kind Code:
B2
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Inventors:
田辺 勝
細谷 守男
Application Number:
JP2010193427A
Publication Date:
December 03, 2014
Filing Date:
August 31, 2010
Export Citation:
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Assignee:
ＨＯＹＡ株式会社
International Classes:
G03F1/50; G03F1/60; G03F1/82
Attorney, Agent or Firm:
Hajime Tsukuni
Yasuo Yanagibashi
Akio Shibata



 
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