Title:
変位センサ
Document Type and Number:
Japanese Patent JP5662046
Kind Code:
B2
Inventors:
▲榊▼原 靖志
Application Number:
JP2010084485A
Publication Date:
January 28, 2015
Filing Date:
March 31, 2010
Export Citation:
Assignee:
パナソニック デバイスＳＵＮＸ株式会社
International Classes:
G01B11/00; G01B11/24; G01C3/06
Attorney, Agent or Firm:
Makoto Onda
Hironori Onda
Hironori Onda