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Title:
帯状のシート基板のための搬送装置及び処理装置、デバイス製造方法
Document Type and Number:
Japanese Patent JP5765240
Kind Code:
B2
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JP3086120PROBLEM TO BE SOLVED: To provide a pinch roll for correcting meandering of a strip, a meandering correction device, and a method for correcting meandering.
Inventors:
Tomoya Suzuki
Application Number:
JP2011553889A
Publication Date:
August 19, 2015
Filing Date:
February 10, 2011
Export Citation:
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Assignee:
NIKON CORPORATION
International Classes:
B65H23/038; B65H23/32
Domestic Patent References:
JPH09295744A1997-11-18
JPS58100054A1983-06-14
JPS5731549A1982-02-20
JPS5992857A1984-05-29
JP2008100841A2008-05-01
JPS58100054A1983-06-14
JPH09295744A1997-11-18
JP2005298129A2005-10-27
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi



 
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