Title:
ホットワイヤ式処理装置
Document Type and Number:
Japanese Patent JP5792215
Kind Code:
B2
Inventors:
Katsufumi Kumano
Hideharu Tanaka
Masayoshi Esashi
Hideharu Tanaka
Masayoshi Esashi
Application Number:
JP2013047127A
Publication Date:
October 07, 2015
Filing Date:
March 08, 2013
Export Citation:
Assignee:
Tohoku University
International Classes:
H01L21/205; C23C16/44; H01L21/31
Domestic Patent References:
| JP2000150498A | ||||
| JP2005179743A | ||||
| JP9183697A | ||||
| JP2012529165A | ||||
| JP2004149857A | ||||
| JP2003297818A |
Attorney, Agent or Firm:
Hiroaki Sakai
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