Title:
光インプリント用モールドおよびその製造方法
Document Type and Number:
Japanese Patent JP5821909
Kind Code:
B2
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Inventors:
Chiba Australia
Kimio Ito
Kimio Ito
Application Number:
JP2013157341A
Publication Date:
November 24, 2015
Filing Date:
July 30, 2013
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
H01L21/027; B29C59/02; B81B1/00
Domestic Patent References:
| JP2009023113A | ||||
| JP2007103924A | ||||
| JP2003249444A | ||||
| JP2007535172A | ||||
| JP2008296441A | ||||
| JP2007536750A |
Foreign References:
| US20030138704 | ||||
| US20080237936 | ||||
| US20080206655 | ||||
| US20050236360 | ||||
| WO2009034954A1 |
Attorney, Agent or Firm:
Junzo Yoneda
Masataka Ota
Masataka Ota