Title:
圧電バルク弾性波素子の製造方法及び圧電バルク弾性波素子
Document Type and Number:
Japanese Patent JP5839103
Kind Code:
B2
Abstract:
A method for manufacturing a piezoelectric bulk acoustic wave element by forming a sacrificial layer on a part of a primary surface of a substrate. A piezoelectric film sandwiched between a pair of electrodes is formed on the primary surface of the substrate so as to cover the sacrificial layer, the piezoelectric film being formed from scandium-containing aluminum nitride having a scandium atomic concentration with respect to the total number of scandium atoms and aluminum atoms of more than 24 atomic percent. An etching step of removing the sacrificial layer by etching is performed. Prior to the etching step, a protective film formed from aluminum nitride or scandium-containing aluminum nitride having a lower scandium atomic concentration than that of the piezoelectric film is provided so as to cover at least a part of a portion of the piezoelectric film located in a region in which the sacrificial layer is provided.
Inventors:
Araki Saint
Keiichi Umeda
Keiichi Umeda
Application Number:
JP2014500650A
Publication Date:
January 06, 2016
Filing Date:
February 08, 2013
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
H03H3/02; H03H9/17
Domestic Patent References:
| JP2008172713A | ||||
| JP2009010926A | ||||
| JP2011015148A | ||||
| JP2008160322A | ||||
| JP2008022305A |
Attorney, Agent or Firm:
Patent business corporation Miya saki, table of contents patent office