Title:
薄膜トランジスタの製造方法
Document Type and Number:
Japanese Patent JP5857432
Kind Code:
B2
Inventors:
Okumura Shohei
Application Number:
JP2011086974A
Publication Date:
February 10, 2016
Filing Date:
April 11, 2011
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
H01L21/336; C23C14/08; H01L21/363; H01L29/786
Domestic Patent References:
| JP2011009719A | ||||
| JP2010186860A | ||||
| JP2010251735A | ||||
| JP2011054942A |
Foreign References:
| WO2009148154A1 |
Attorney, Agent or Firm:
Shunichi Yoshimura
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