Title:
検査用照明装置及び検査用照明方法
Document Type and Number:
Japanese Patent JP5895305
Kind Code:
B2
Abstract:
In order to provide a lighting device for inspection and lighting method for inspection that, with use of inspection light, make it possible for a difference between a defect and a normal part, such as contrast, to appear, the lighting device for inspection is provided with: a surface light source 1 that emits the inspection light; a lens 2 that is provided on a light axis LX of the inspection light emitted from the surface light source 1, and between an inspection object W and the surface light source 1; and a first diaphragm 31 that is provided between the surface light source 1 and the lens 2, or between the lens 2 and the inspection object W, wherein: positions of the surface light source 1 and the lens 2 with respect to the inspection object W are set such that an image plane IM on which the surface light source 1 is imaged is present near the inspection object W; and a position of the first diaphragm 31 with respect to the lens 2 is set such that the central axis of an irradiation solid angle determined by a part of the inspection light, which is incident on an outer edge part of the image plane IM, is parallel to the light axis LX, or is displaced from the light axis and tilted by a predetermined amount.
Inventors:
Shigeki Masumura
Application Number:
JP2011267321A
Publication Date:
March 30, 2016
Filing Date:
December 06, 2011
Export Citation:
Assignee:
CCS Inc.
International Classes:
G01N21/84
Domestic Patent References:
| JP2005148296A | ||||
| JP2009019882A | ||||
| JP2007133435A | ||||
| JP2006046946A | ||||
| JP2008076962A |
Attorney, Agent or Firm:
Ryuhei Nishimura