Title:
蒸着マスクの製造方法
Document Type and Number:
Japanese Patent JP5958824
Kind Code:
B2
Abstract:
A production method for a deposition mask is provided. The production method includes the steps of: forming a mask member having a structure in which a thin-board magnetic metal member having a through hole and a resin film contact tightly with each other; forming a mark that has a specified depth by irradiating a part of the film through the through hole of the mask member with laser beams; and forming an opening pattern that penetrates the film by irradiating a predetermined position with laser beams, using the mark as a reference.
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Inventors:
Mizumura Tsushin
Application Number:
JP2012250974A
Publication Date:
August 02, 2016
Filing Date:
November 15, 2012
Export Citation:
Assignee:
Buoy Technology Co., Ltd.
International Classes:
C23C14/04
Domestic Patent References:
| JP2012077328A | ||||
| JP2006188748A | ||||
| JP2004190057A |
Attorney, Agent or Firm:
Moriaki Ogawa
Haruyuki Nishiyama
Shoichi Okuyama
Haruyuki Nishiyama
Shoichi Okuyama