Title:
組成物、パターンが形成された基板の製造方法、並びに膜及びその形成方法
Document Type and Number:
Japanese Patent JP6311703
Kind Code:
B2
Abstract:
A composition includes a compound including a partial structure represented by formula (1), and solvent. In the formula (1), X1 and X2 each independently represent a substituted or unsubstituted ring structure having 4 to 10 ring atoms constituted taken together with the spiro carbon atom and the carbon atoms of the aromatic ring adjacent to X1 or X2; n1 and n2 are each independently an integer of 0 to 2; and the sum of k1 and k2 are each independently an integer of 1 to 8, wherein the sum of k1 and k2 is no less than 2 and no greater than 16. The compound is preferably represented by formula (2). The sum of k1 and k2 in the formula (1) is preferably no less than 3.
Inventors:
Shinya Nakato
Ikuhiro Toyokawa
Takeshi Wakamatsu
Yoshio Takimoto
Katsuhisa Mizoguchi
Takashi Okada
Takaaki Uno
Takeshi Endo
Moriki Masaki
Ikuhiro Toyokawa
Takeshi Wakamatsu
Yoshio Takimoto
Katsuhisa Mizoguchi
Takashi Okada
Takaaki Uno
Takeshi Endo
Moriki Masaki
Application Number:
JP2015508390A
Publication Date:
April 18, 2018
Filing Date:
March 19, 2014
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G03F7/11; C07C255/54; C08G65/40; C08L71/08
Domestic Patent References:
| JP2005128509A | ||||
| JP2006058427A | ||||
| JP5140296A | ||||
| JP5339365A | ||||
| JP2000159715A | ||||
| JP2002356551A | ||||
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Attorney, Agent or Firm:
Hajime Amano