検出装置、顕微鏡および処理装置

Title:

検出装置、顕微鏡および処理装置

Document Type and Number:

Japanese Patent JP6427890

Kind Code:

B2

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Inventors:

Naoki Fukutake
Yusuke Taki

Application Number:

JP2014024970A

Publication Date:

November 28, 2018

Filing Date:

February 13, 2014

Export Citation:

Assignee:

NIKON CORPORATION

International Classes:

G01N21/65; G02B21/00

Domestic Patent References:

Foreign References:

WO2008038642A1
WO1995010768A1

Attorney, Agent or Firm:

Longhua International Patent Service Corporation

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