Title:
ダイヤモンド基板及びダイヤモンド基板の製造方法
Document Type and Number:
Japanese Patent JP6450920
Kind Code:
B2
Abstract:
The crystal plane in the interior of the diamond substrate has a curvature higher than 0 km -1 and equal to or lower than 1500 km -1 by preparing a base substrate, forming a plurality of pillar-shaped diamonds formed of diamond single crystals on one side of the base substrate, causing diamond single crystals to grow from tips of each pillar-shaped diamond, coalescing each of the diamond single crystals grown from the tips of each pillar-shaped diamond to form a diamond substrate layer, separating the diamond substrate layer from the base substrate, and manufacturing the diamond substrate from the diamond substrate layer.
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Inventors:
Aida Hideo
Koji Koyama
Kenjiro Ikejiri
Seisuke Kim
Yoichi Yaguchi
Koji Koyama
Kenjiro Ikejiri
Seisuke Kim
Yoichi Yaguchi
Application Number:
JP2017163820A
Publication Date:
January 16, 2019
Filing Date:
August 29, 2017
Export Citation:
Assignee:
Adamant Namiki Precision Jewel Co., Ltd.
International Classes:
C30B29/04; C23C16/27; C30B25/02; H01L21/205
Domestic Patent References:
| JP6183892A | ||||
| JP6247793A | ||||
| JP2006306718A | ||||
| JP2010030896A | ||||
| JP8133893A | ||||
| JP2008174394A | ||||
| JP9184082A |