Title:
エピタキシャルウェーハの製造方法
Document Type and Number:
Japanese Patent JP6474048
Kind Code:
B2
Inventors:
Yuta Tamba
Application Number:
JP2015252936A
Publication Date:
February 27, 2019
Filing Date:
December 25, 2015
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
H01L21/205; C23C16/02; C23C16/24; C30B29/06; H01L21/20
Domestic Patent References:
| JP2000260711A | ||||
| JP62226891A | ||||
| JP47019784A | ||||
| JP8236458A | ||||
| JP2000100737A | ||||
| JP2004339003A | ||||
| JP2004091234A | ||||
| JP2011216780A | ||||
| JP5347256A | ||||
| JP10247731A |
Attorney, Agent or Firm:
Ryuji Harikawa