Title:
液体試薬の超高純度保存および分注
Document Type and Number:
Japanese Patent JP6490582
Kind Code:
B2
Abstract:
A supply vessel for dispensing of ultra-high purity chemical reagents, comprising a metal container defining an enclosable interior volume including interior surface structure, wherein the interior surface structure is coated with an ultra-high purity effective polyperfluoroalkoxyethylene coating. Such supply vessel may for example be utilized for storage and dispensing of ultra-high purity chemical reagent to a semiconductor manufacturing tool, or a tool for manufacturing of flat-panel displays, or solar panels.
Inventors:
Nate, Don Kaye
Cler, Andy
McFerron, Mitchell W
Jackson, Stephen
Robinson, Joel
Cler, Andy
McFerron, Mitchell W
Jackson, Stephen
Robinson, Joel
Application Number:
JP2015526681A
Publication Date:
March 27, 2019
Filing Date:
August 07, 2013
Export Citation:
Assignee:
Entegris Incorporated
International Classes:
H01L21/02; H01L21/304
Domestic Patent References:
| JP2005236050A | ||||
| JP4101838A | ||||
| JP10273193A | ||||
| JP2001341794A |
Foreign References:
| US5928743 | ||||
| US5046638 | ||||
| US20030015249 |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation