Title:
発振水晶のための拡散バリア、堆積速度を測定するための測定アセンブリ及びその方法
Document Type and Number:
Japanese Patent JP6502528
Kind Code:
B2
Abstract:
A detection element for a measurement assembly adapted to measure a deposition rate of an evaporated material on a substrate. The detection element comprising: an oscillation crystal for detecting the deposition rate; and a barrier layer comprising a barrier material covering at least a portion of the oscillation crystal configured to prevent the evaporated material from diffusing into the oscillation crystal.
Inventors:
Diegos-Campo, Jose Manuel
Bungert, Stephan
Land graph, Haike
Bungert, Stephan
Land graph, Haike
Application Number:
JP2017557365A
Publication Date:
April 17, 2019
Filing Date:
September 22, 2015
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
G01N5/02; C23C14/24; H05B33/10
Domestic Patent References:
| JP3046504A | ||||
| JP2002373782A |
Foreign References:
| US20140053779 |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation