Title:
位相敏感ビーム・トラッキング
Document Type and Number:
Japanese Patent JP6553309
Kind Code:
B2
Abstract:
A method includes receiving axis signals (520, 530, 540, 550) from a multi-axis position sensing detector (510), generating a reference signal (660) by summing the axis signals, determining a mirror position of a mirror (880) directing the optical beam based on the beam position error (780, 790) of each axis of the multi-axis position sensing detector, and actuating the mirror to move to the mirror position. Each axis signal is indicative of a beam position (122) of an optical beam incident on the multi-axis position sensing detector, each axis signal corresponding to an axis of the multi-axis position sensing detector. For each axis, the method includes converting a phase of an axis to have a 90 degree phase difference from a signal of the axis, generating an axis-phasor signal (640, 650) by summing the axis signals, and comparing the axis-phasor signal and the reference signal to determine a phase difference.
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Inventors:
Robert Swinkles
Ulander, Claus
Ulander, Claus
Application Number:
JP2018554759A
Publication Date:
July 31, 2019
Filing Date:
April 27, 2017
Export Citation:
Assignee:
X Development LLC
International Classes:
H04B10/112
Domestic Patent References:
| JP2001111491A | ||||
| JP2006319882A | ||||
| JP2013150302A |
Foreign References:
| WO2015142678A1 | ||||
| WO2014163741A1 | ||||
| US6469815 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Mutsumi Sato
Mutsumi Sato