Title:
プレチルト角測定装置及びプレチルト角測定方法
Document Type and Number:
Japanese Patent JP6584947
Kind Code:
B2
Abstract:
To provide a pre-tilt angle measurement device and pre-tilt angle measurement method that can suppress errors. A pre-tilt angle measurement device 1 comprises: a transmission measurement light projection unit 2 that irradiates a measurement position M of a liquid crystal substrate LC with polarized measurement light; a transmission measurement light reception unit 3 that receives transmission light of the measurement light to acquire a polarization state of the transmission light; a tilt measurement light projection unit 41 that irradiates the measurement position M of the liquid crystal substrate LC with tilt detection light L1; a tilt measurement light reception unit 43 that receives reflection light L2 of the tilt detection light L1 to acquire a light reception position of the reflection light L2; and a control unit 10 that calculates a tilt angle of measurement position M of the liquid crystal substrate LC on the basis of the light reception position of the reflection light L2, and calculates a pre-tilt angle of a liquid crystal molecule included in the liquid crystal substrate LC on the basis of an irradiation angle of the transmission light, the tilt angle of the measurement position M of the liquid crystal substrate LC, and the polarization state of the transmission light.
Inventors:
Kazuhiro Sugita
Daisuke Inano
Mako Imasaka
Daisuke Inano
Mako Imasaka
Application Number:
JP2015254852A
Publication Date:
October 02, 2019
Filing Date:
December 25, 2015
Export Citation:
Assignee:
Otsuka Electronics Co., Ltd.
International Classes:
G01N21/21; G02F1/13
Domestic Patent References:
| JP2010107758A | ||||
| JP2010204378A | ||||
| JP2001356072A | ||||
| JP200858865A | ||||
| JP9152321A | ||||
| JP11190851A | ||||
| JP2008191020A | ||||
| JP200638775A | ||||
| JP2003202573A |
Foreign References:
| US20110149070 |
Attorney, Agent or Firm:
Haruka International Patent Office