Title:
研磨装置
Document Type and Number:
Japanese Patent JP6625461
Kind Code:
B2
Inventors:
Yu Ishii
Yuji Yagi
Akihiro Mochida
Akihiro Tanizawa
Yuji Yagi
Akihiro Mochida
Akihiro Tanizawa
Application Number:
JP2016058567A
Publication Date:
December 25, 2019
Filing Date:
March 23, 2016
Export Citation:
Assignee:
Ebara Corporation
International Classes:
H01L21/304; B24B21/00
Domestic Patent References:
| JP2006319249A | ||||
| JP2014150178A |
Attorney, Agent or Firm:
Isamu Watanabe
Tetsuya Hirosawa
Tetsuya Hirosawa