Title:
Ｘ線検査装置
Document Type and Number:
Japanese Patent JP6719272
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an X-ray inspection device with which it is possible to obtain a wide-field image and a high-definition image of a test object at the same time by one time of photographing and specify an appropriate inspection position of the test object by few times of photographing.SOLUTION: The X-ray inspection device comprises a stage 2 on which a test object S is placed, an X-ray source 3 for irradiating the test object S with X-rays, and a plurality of X-ray detectors 4, 5 for detecting X-rays having passed through the test object S. The plurality of X-ray detectors 4, 5 are arranged side by side in the periphery of positions facing the X-ray source 3 across the stage 2, with the respective inspection surfaces 4a, 5a arranged aslant to the axial direction of X-rays radiated from the X-ray source 3, and images of the test object S at an inspection position are imaged simultaneously with different fields of vision using at least one X-ray detector 4 and the other X-ray detector 5 out of the plurality of X-ray detectors 4, 5.SELECTED DRAWING: Figure 1
Inventors:
Tatsuya Ishimoto
Takahiro Tokumiya
Moroishi Fumitaka
Takahiro Tokumiya
Moroishi Fumitaka
Application Number:
JP2016097254A
Publication Date:
July 08, 2020
Filing Date:
May 13, 2016
Export Citation:
Assignee:
Samsung Electronics Co.,Ltd.
International Classes:
G01N23/044; G01N23/046; G01N23/083; G01N23/18
Domestic Patent References:
| JP2009036575A | ||||
| JP2005292047A | ||||
| JP2010133982A |
Foreign References:
| US20040184576 |
Attorney, Agent or Firm:
Tatsuhiko Abe
Shinya Mitsuhiro
Choi
Keiji Kiuchi
Shinya Mitsuhiro
Choi
Keiji Kiuchi