Title:
荷電粒子を検出するためのデバイス及び、それを組み込んだ質量分析用の装置
Document Type and Number:
Japanese Patent JP6831006
Kind Code:
B2
Abstract:
A device for detecting charged particles includes a substrate, a charge detection plate and an integrated circuit unit that are electrically connected together and respectively disposed on non-coplanar first and second sides of the substrate, and an interference shielding unit substantially enclosing the charge detection plate and the integrated circuit unit in such a manner as to permit impingement on the charge detection plate by the charged particles from outside of the interference shielding unit. The integrated circuit unit disposed on the second side is non-coplanar with the charge detection plate disposed on the first side so as to prevent interference on the integrated circuit unit by the charged particles.
Inventors:
Hun-Lian Xie
Chun-Yen Cheng
Lee Kun Li
Qi-Shang Yang
Lian-Chun Fan
Yao-Shin Tseng
Tsu-Way Chow
Chun-Yen Cheng
Lee Kun Li
Qi-Shang Yang
Lian-Chun Fan
Yao-Shin Tseng
Tsu-Way Chow
Application Number:
JP2019511822A
Publication Date:
February 17, 2021
Filing Date:
May 09, 2017
Export Citation:
Assignee:
ACROMASS TECHNOLOGIES,INC.
International Classes:
H01J49/26; G01N27/62; H01J49/02; H01J49/42
Domestic Patent References:
| JP2000508823A | ||||
| JP2013518370A | ||||
| JP2011507194A | ||||
| JP2016506521A | ||||
| JP2011506994A | ||||
| JP2011139024A |
Foreign References:
| US20150137307 | ||||
| CN102771194A |
Attorney, Agent or Firm:
Yasuhiko Murayama
Shinya Mitsuhiro
Tatsuhiko Abe
Shinya Mitsuhiro
Tatsuhiko Abe