環状シロキサン化合物、その製造方法、それを用いてなる電気絶縁膜の製造法及び膜

Title:

環状シロキサン化合物、その製造方法、それを用いてなる電気絶縁膜の製造法及び膜

Document Type and Number:

Japanese Patent JP6862049

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide a cyclic siloxane compound which has a high vapor pressure and an excellent vaporization property, exhibits a high deposition rate by the PECVD method, and is liquid at room temperature.SOLUTION: The cyclic siloxane compound is represented by general formula (1). (Rrepresents a C3-5 alkyl group; Rand Rmay each independently represent a C1-3 alkyl group, and may together form a C3-6 alkylene group; and n, m and o are each independently 1 or 2 and satisfy n+m+o=4.)SELECTED DRAWING: None

More Like This:

JP6267800	A novel cyclodisilazane derivative, a method for producing the same, and a silicon-containing thin film using the same.
JP2005533343	Charge transport compositions that are quinazoline derivatives and electronic devices made using such compositions
JP6491359	Method for Producing Cyclic siloxane Compound from Organodihalosilane

Inventors:

Ryoji Tanaka
Nunokawa Marina
Yuki Yamamoto
Yasushi Furukawa
Yoichi Chiba

Application Number:

JP2017070925A

Publication Date:

April 21, 2021

Filing Date:

March 31, 2017

Export Citation:

Click for automatic bibliography generation Help

Assignee:

Tosoh Corporation
Sagami Central Chemical Research Institute

International Classes:

C07F7/21; C23C16/18; H01L21/312; H01L21/768; H01L23/532

Domestic Patent References:

JP2007096237A
JP2005336391A
JP2005051192A
JP2015111712A

Foreign References:

US20020132408
US20070077778
WO2007032261A1
US3719696
US2884434
CN104693231A

Previous Patent: 吸引車

Next Patent: 被曝予防剤塗布装置及び被曝予防剤塗布方法