Title:
焼成用セッター
Document Type and Number:
Japanese Patent JP7352747
Kind Code:
B2
Abstract:
This firing setter includes: a ceramic substrate; and a covering layer which covers the surface of the substrate, has a covering film thickness of 1 μm to 20 μm, and has a surface roughness Ra of 1 μm or less.
Inventors:
Kazuki Nukimizu
Masayuki Watanabe
Hiroaki Nihonmatsu
Yoshimasa Kondo
Nao Nakayama
Masayuki Watanabe
Hiroaki Nihonmatsu
Yoshimasa Kondo
Nao Nakayama
Application Number:
JP2022546181A
Publication Date:
September 28, 2023
Filing Date:
August 04, 2021
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
NGK Adrec Co., Ltd.
NGK Adrec Co., Ltd.
International Classes:
F27D3/12; C04B35/01
Domestic Patent References:
| JP2011046562A | ||||
| JP2018138498A | ||||
| JP2005255491A | ||||
| JP2000109370A |
Attorney, Agent or Firm:
Patent Attorney Corporation Kaiyu International Patent Office