Title:
基板供給システムおよび基板加工装置
Document Type and Number:
Japanese Patent JP7432243
Kind Code:
B2
Abstract:
This substrate supply system (1) supplies substrates (W) to a conveyance path from a cassette (10) which houses a plurality of substrates (W) in a state stacked separated by a prescribed interval, and is provided with: a first storage unit (101) which detachably stores a first cassette (10); a second storage unit (102) which detachably stores a second cassette (20); a pull-out mechanism (200) which pulls substrates (W) out of the first cassette (10) and the second cassette (20) in a direction perpendicular to the direction of stacking of the substrates (W) and transfers these to the conveyance path; and a moving mechanism (300) which moves the pull-out mechanism (200) between the first storage unit (101) and the second storage unit (102).
Inventors:
Osamu Okuda
Application Number:
JP2020553785A
Publication Date:
February 16, 2024
Filing Date:
October 18, 2019
Export Citation:
Assignee:
Samsung Diamond Industry Co., Ltd.
International Classes:
H01L21/677; H01L21/301
Domestic Patent References:
| JP200910287A | ||||
| JP2012146872A | ||||
| JP9199575A | ||||
| JP5175256A | ||||
| JP778794A | ||||
| JP2015138856A | ||||
| JP6347036A | ||||
| JP2012156413A | ||||
| JP2017175029A | ||||
| JP2016514376A |
Foreign References:
| WO2003082542A1 |
Attorney, Agent or Firm:
Masamasa Shibano
Makoto Ohashi
Makoto Ohashi