Login| Sign Up| Help| Contact|

Patent Searching and Data


Document Type and Number:
Japanese Patent JPH01152728
Kind Code:
U
Application Number:
JP4990388U
Publication Date:
October 20, 1989
Filing Date:
April 15, 1988
Export Citation:
Click for automatic bibliography generation   Help
International Classes:
G21F9/12; B01J45/00; B01J47/14; G21F9/00; (IPC1-7): B01J45/00; B01J47/14; G21F9/12



 
Previous Patent: ELECTRON BEAM LITHOGRAPHY

Next Patent: JPH01152729