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Patent Searching and Data


Document Type and Number:
Japanese Patent JPH0413050
Kind Code:
U
More Like This:
WO/2012/010318DEVICE AND METHOD FOR VACUUM COATING
JP5337632Film forming equipment and organic EL device manufacturing equipment
Application Number:
JP5051190U
Publication Date:
February 03, 1992
Filing Date:
May 14, 1990
Export Citation:
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International Classes:
C23C14/50; H01L21/203; H01L21/302; H01L21/3065; (IPC1-7): C23C14/50; H01L21/203; H01L21/302



 
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