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Document Type and Number:
Japanese Patent JPH0585859
Kind Code:
B2
More Like This:
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Inventors:
SHIBATA TAKEYOSHI
KOIKE TOSHIO
MASUBUCHI SHIGEHIKO
Application Number:
JP27667886A
Publication Date:
December 09, 1993
Filing Date:
November 21, 1986
Export Citation:
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Assignee:
JAPAN ATOMIC ENERGY RES INST
ULVAC CORP
International Classes:
G01L21/32; G01D3/02; G01D3/024; (IPC1-7): G01L21/32; G01D3/02



 
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