Title:
【考案の名称】接触式表面形状測定器
Document Type and Number:
Japanese Patent JPH0649954
Kind Code:
U
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Inventors:
Akira Higuchi
Application Number:
JP8854992U
Publication Date:
July 08, 1994
Filing Date:
December 02, 1992
Export Citation:
Assignee:
Kosaka Research Institute, Ltd.
International Classes:
G01B11/24; G01B11/245; (IPC1-7): G01B11/24
Domestic Patent References:
JPS54160266A | 1979-12-18 | |||
JPS62233704A | 1987-10-14 |
Attorney, Agent or Firm:
Kinzo Oyama (1 person outside)
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