Title:
【発明の名称】プラズマCVD装置
Document Type and Number:
Japanese Patent JPH07118461
Kind Code:
B2
Inventors:
Yukio Kamura
Yoshinori Ishida
Takuya Nishimoto
Yoshinori Ishida
Takuya Nishimoto
Application Number:
JP26145387A
Publication Date:
December 18, 1995
Filing Date:
October 16, 1987
Export Citation:
Assignee:
THE FURUKAW ELECTRIC CO.,LTD.
International Classes:
H01L21/205; H01L21/31; (IPC1-7): H01L21/205
Attorney, Agent or Firm:
Hidetoshi Matsumoto
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