Title:
【発明の名称】圧電型圧力分布センサ
Document Type and Number:
Japanese Patent JPH071210
Kind Code:
B2
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Inventors:
Jun Tabota
Application Number:
JP4066289A
Publication Date:
January 11, 1995
Filing Date:
February 20, 1989
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
G01L5/00; (IPC1-7): G01L5/00
Domestic Patent References:
| JP63134929A | ||||
| JP6329740U |
Attorney, Agent or Firm:
Miya Saki Main tax
Next Patent: ELECTRICALLY POWERED CHUCK DEVICE