Title:
【考案の名称】タ-ボ分子ポンプ
Document Type and Number:
Japanese Patent JPH077594
Kind Code:
Y2
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Inventors:
Hayakawa Morie
Application Number:
JP837991U
Publication Date:
February 22, 1995
Filing Date:
February 22, 1991
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
F04D19/04; (IPC1-7): F04D19/04
Domestic Patent References:
| JP4112996A |
Attorney, Agent or Firm:
Kazuhiro Akazawa
Next Patent: FACSIMILE SYSTEM