【発明の名称】液相エピタキシヤル成長用ボ-ト

Title:

【発明の名称】液相エピタキシヤル成長用ボ-ト

Document Type and Number:

Japanese Patent JPH08754

Kind Code:

B2

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Inventors:

Kenji Yasumura
Yoshiharu Komine
Ryoji Okata
Kimura Hiroshi
Ken Sato

Application Number:

JP10100285A

Publication Date:

January 10, 1996

Filing Date:

May 13, 1985

Export Citation:

Assignee:

Mitsubishi Electric Corporation

International Classes:

C30B19/06; C30B29/48; H01L21/208; (IPC1-7): C30B19/06; C30B29/48; H01L21/208

Domestic Patent References:

Attorney, Agent or Firm:

Takada Mamoru

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