Document Type and Number:
Japanese Patent JPS4926750
Kind Code:
B1
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Application Number:
JP5433570A
Publication Date:
July 11, 1974
Filing Date:
June 24, 1970
Export Citation:
International Classes:
H01L29/78; H01L21/22; H01L21/316; H01L21/331; H01L21/768; H01L23/522; H01L29/73; H01L29/861; H01L; (IPC1-7): H01L/