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Document Type and Number:
Japanese Patent JPS5175387
Kind Code:
A
Inventors:
ISHIDA TOSHIRO
Application Number:
JP14840274A
Publication Date:
June 29, 1976
Filing Date:
December 26, 1974
Export Citation:
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Assignee:
YONEYAMA TAKESHI
ISHIDA TOSHIRO
International Classes:
H01L29/73; H01L21/331; H01L29/70; H01L29/74; H01L29/744; (IPC1-7): H01L29/70; H01L29/74



 
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